Phase control of sputter-grown large-area MoTe2 films by preferential sublimation of Te: amorphous, 1T′ and 2H phases
S. Hatayama, Y. Saito, Kotaro Makino, N. Uchida, Yi Shuang, Shunsuke Mori, Y. Sutou, M. Krbal, P. Fons
Journal of Materials Chemistry C